Show simple item record

Influence of chemical treatments on selective epitaxial growth of InP in STI nano-trenches on Si (001) substrates

dc.contributor.authorJiang, Sijia
dc.contributor.authorMerckling, Clement
dc.contributor.authorWaldron, Niamh
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorCaymax, Matty
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-20T11:54:03Z
dc.date.available2021-10-20T11:54:03Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20868
dc.sourceIIOimport
dc.titleInfluence of chemical treatments on selective epitaxial growth of InP in STI nano-trenches on Si (001) substrates
dc.typeMeeting abstract
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorWaldron, Niamh
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.source.peerreviewno
dc.source.conferenceE-MRS Spring Meeting Symposium M: More than Moore
dc.source.conferencedate14/05/2012
dc.source.conferencelocationStrasbourg France
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record