Authors

Jiang, Sijia; Merckling, Clement; Waldron, Niamh; Vandervorst, Wilfried; Caymax, Matty; Heyns, Marc

Conference

E-MRS Spring Meeting Symposium M: More than Moore

Title

Influence of chemical treatments on selective epitaxial growth of InP in STI nano-trenches on Si (001) substrates

Publication type

Meeting abstract