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Influence of chemical treatments on selective epitaxial growth of InP in STI nano-trenches on Si (001) substrates
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Influence of chemical treatments on selective epitaxial growth of InP in STI nano-trenches on Si (001) substrates
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Date
2012
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Jiang, Sijia
;
Merckling, Clement
;
Waldron, Niamh
;
Vandervorst, Wilfried
;
Caymax, Matty
;
Heyns, Marc
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1866
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Acq. date: 2025-12-11
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Metrics
Views
1866
since deposited on 2021-10-20
1
last month
Acq. date: 2025-12-11
Citations