Publication:

Influence of chemical treatments on selective epitaxial growth of InP in STI nano-trenches on Si (001) substrates

Date

2012
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorJiang, Sijia
dc.contributor.authorMerckling, Clement
dc.contributor.authorWaldron, Niamh
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorCaymax, Matty
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorWaldron, Niamh
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.date.accessioned2021-10-20T11:54:03Z
dc.date.available2021-10-20T11:54:03Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20868
dc.source.conferenceE-MRS Spring Meeting Symposium M: More than Moore
dc.source.conferencedate14/05/2012
dc.source.conferencelocationStrasbourg France
dc.title

Influence of chemical treatments on selective epitaxial growth of InP in STI nano-trenches on Si (001) substrates

dc.typeMeeting abstract
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions