Authors

Jin, Youseung; Waldron, Niamh; Orzali, Tommaso; Caymax, Matty; Horiguchi, Naoto; Park, TaeHyun; Jiang, Zhiming; Han, SangHyun

Conference

23rd annual SEMI Advanced Semiconductor Manufacturing Conference - ASMC

Title

Optical metrology of thickness and indium content of epitaxial InxGa1-xAs layers on Si substrates

Publication type

Proceedings paper