Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Optical metrology of thickness and indium content of epitaxial InxGa1-xAs layers on Si substrates
Publication:
Optical metrology of thickness and indium content of epitaxial InxGa1-xAs layers on Si substrates
Copy permalink
Date
2012
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Jin, Youseung
;
Waldron, Niamh
;
Orzali, Tommaso
;
Caymax, Matty
;
Horiguchi, Naoto
;
Park, TaeHyun
;
Jiang, Zhiming
;
Han, SangHyun
Journal
Abstract
Description
Metrics
Views
1864
since deposited on 2021-10-20
1
last month
Acq. date: 2025-12-11
Citations
Metrics
Views
1864
since deposited on 2021-10-20
1
last month
Acq. date: 2025-12-11
Citations