E-beam direct write using a chemically amplified negative tone resist

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Authors
Seabra, Antonio C.; Jonckheere, Rik; Van den hove, Luc
Conference
IX Congresso da Sociedade Brasileira de Microelectronica - IX SBMICRO
Title
E-beam direct write using a chemically amplified negative tone resist
Publication type
Proceedings paper
Embargo date
9999-12-31
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