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Optical testing of submicron-technology MOSFETs and bipolar transistors

dc.contributor.authorPogany, D.
dc.contributor.authorFürböck, C.
dc.contributor.authorSeliger, N.
dc.contributor.authorHabas, Predrag
dc.contributor.authorGornik, E.
dc.contributor.authorKubicek, Stefan
dc.contributor.authorDecoutere, Stefaan
dc.date.accessioned2021-09-30T09:25:12Z
dc.date.available2021-09-30T09:25:12Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2092
dc.sourceIIOimport
dc.titleOptical testing of submicron-technology MOSFETs and bipolar transistors
dc.typeProceedings paper
dc.contributor.imecauthorKubicek, Stefan
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage372
dc.source.endpage375
dc.source.conferenceESSDERC '97: Proceedings of the 27th European Solid-State Device Research Conference
dc.source.conferencedate22/09/1997
dc.source.conferencelocationStuttgart Germany
imec.availabilityPublished - open access


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