Optical testing of submicron-technology MOSFETs and bipolar transistors

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Authors
Pogany, D.; Fürböck, C.; Seliger, N.; Habas, Predrag; Gornik, E.; Kubicek, Stefan; Decoutere, Stefaan
Conference
ESSDERC '97: Proceedings of the 27th European Solid-State Device Research Conference
Title
Optical testing of submicron-technology MOSFETs and bipolar transistors
Publication type
Proceedings paper
Embargo date
9999-12-31
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