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Understanding of trap-assisted tunneling current - assisted by oxygen vacancies in RuOx/SrTiO3/TiN MIM capacitor for the DRAM Application
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Authors
Kim, Min-Soo
;
Kaczer, Ben
;
Starschich, Sergej
;
Popovici, Mihaela Ioana
;
Swerts, Johan
;
Richard, Olivier
;
Tomida, Kazuyuki
;
Vrancken, Christa
;
Van Elshocht, Sven
;
Debusschere, Ingrid
;
Altimime, Laith
;
Kittl, Jorge
Conference
4th IEEE International Memory Workshop - IMW
Title
Understanding of trap-assisted tunneling current - assisted by oxygen vacancies in RuOx/SrTiO3/TiN MIM capacitor for the DRAM Application
Publication type
Proceedings paper
Embargo date
9999-12-31
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