Authors

Kudou, Jyun; Funasaki, Suguru; Takahara, Motoki; Takakura, Kenichiro; Ohyama, Hidenori; Nakashima, Toshiyuki; Shibuya, Mutsuo; Murakami, Katsuya; Simoen, Eddy; Claeys, Cor

ISSN

0255-5476

Journal

Materials Science Forum

Volume

725

Title

XRD investigation of the crystalline quality of Sn-doped β-Ga2O3 films deposited by the RF magnetron sputtering method

Publication type

Journal article

Embargo date

9999-12-31