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Etch challenges of a spin-on trilayer resist system for narrow pitch dual damascene patterning
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Authors
Lazzarino, Frederic
;
Wilson, Chris
;
Truffert, Vincent
;
Vereecke, Bart
;
Demuynck, Steven
;
de Marneffe, Jean-Francois
;
Baklanov, Mikhaïl
Conference
MRS Spring Meeting Symposium C: Interconnect Challenges for CMOS Technology
Title
Etch challenges of a spin-on trilayer resist system for narrow pitch dual damascene patterning
Publication type
Meeting abstract
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