Publication:
Etch challenges of a spin-on trilayer resist system for narrow pitch dual damascene patterning
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1870 since deposited on 2021-10-20
2last month
Acq. date: 2025-12-16
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Metrics
Views
1870 since deposited on 2021-10-20
2last month
Acq. date: 2025-12-16
Citations