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UV-induced modification of fluorocarbon polymer for improvement of wet removal

dc.contributor.authorLe, Quoc Toan
dc.contributor.authorSimms, Ihsan
dc.contributor.authorYue, Henry
dc.contributor.authorBrown, Ian
dc.contributor.authorKesters, Els
dc.contributor.authorStruyf, Herbert
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-20T12:34:47Z
dc.date.available2021-10-20T12:34:47Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20992
dc.sourceIIOimport
dc.titleUV-induced modification of fluorocarbon polymer for improvement of wet removal
dc.typeMeeting abstract
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.conferenceSematech Surface Preparation and Cleaning Conference - SPCC
dc.source.conferencedate19/03/2012
dc.source.conferencelocationAustin, TX USA
imec.availabilityPublished - imec


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