Characterisation of mechanical stress in advanced PBL isolation

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Authors
Jones, S. K.; Ahmed, M.; Rothwell, W. J.; De Wolf, Ingrid; Deferm, Ludo
Conference
24th European Solid State Device Research Conference - ESSDERC
Title
Characterisation of mechanical stress in advanced PBL isolation
Publication type
Proceedings paper
Embargo date
9999-12-31
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