Silicon surface defects: the roles of passivation and surface contamination

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Authors
Reddy, A. J.; Burr, T. A.; Chan, Julia K.; Norga, Gerd; Michel, J.; Kimerling, L. C.
Conference
Defects in Semiconductors 19 - ICDS 19
Title
Silicon surface defects: the roles of passivation and surface contamination
Publication type
Proceedings paper
Embargo date
9999-12-31
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