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Silicon surface defects: the roles of passivation and surface contamination

dc.contributor.authorReddy, A. J.
dc.contributor.authorBurr, T. A.
dc.contributor.authorChan, Julia K.
dc.contributor.authorNorga, Gerd
dc.contributor.authorMichel, J.
dc.contributor.authorKimerling, L. C.
dc.date.accessioned2021-09-30T09:26:49Z
dc.date.available2021-09-30T09:26:49Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2104
dc.sourceIIOimport
dc.titleSilicon surface defects: the roles of passivation and surface contamination
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1719
dc.source.endpage1724
dc.source.conferenceDefects in Semiconductors 19 - ICDS 19
dc.source.conferencedate21/07/1997
dc.source.conferencelocationAveiro Portugal
imec.availabilityPublished - open access


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