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Plasma damage and restoration of a spin-on organic ultra low-k material (k=2.3)

dc.contributor.authorLukaszewicz, Mikolaj
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorWilson, Chris
dc.contributor.authorZhang, Liping
dc.contributor.authorPeng, Hsing-Ying
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-20T13:00:54Z
dc.date.available2021-10-20T13:00:54Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21066
dc.sourceIIOimport
dc.titlePlasma damage and restoration of a spin-on organic ultra low-k material (k=2.3)
dc.typeMeeting abstract
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorZhang, Liping
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.source.peerreviewyes
dc.source.conferenceGaseous Electronics Conference
dc.source.conferencedate22/10/2012
dc.source.conferencelocationAustin, TX USA
imec.availabilityPublished - imec


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