High efficiency low temperature pre-epi clean method for advanced group IV epi processing

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Authors
Machkaoutsan, Vladimir; Weeks, Doran; Bauer, Matthias; Maes, Jan; Tolle, John; Thomas, Shawn; Alian, AliReza; Hikavyy, Andriy; Loo, Roger
Conference
SiGe, Ge, and Related Compunds 5: Materials, Processing, and Devices
Title
High efficiency low temperature pre-epi clean method for advanced group IV epi processing
Publication type
Proceedings paper
Embargo date
9999-12-31
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