Wafer scale processing of plasmonic nanopore arrays in 200mm CMOS fab environment

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Authors
Malachowski, Karl; Verbeeck, Rita; Dupont, Tania; Chen, Chang; Musa, Silke; Li, Yi; Stakenborg, Tim; Sabuncuoglu Tezcan, Deniz; Van Dorpe, Pol
Conference
ECS Fall Meeting Symposium J6: Microfabricated and Nanofabricated Systems for MEMS/NEMS
Title
Wafer scale processing of plasmonic nanopore arrays in 200mm CMOS fab environment
Publication type
Meeting abstract
Embargo date
9999-12-31
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