dc.contributor.author | Malachowski, Karl | |
dc.contributor.author | Verbeeck, Rita | |
dc.contributor.author | Dupont, Tania | |
dc.contributor.author | Chen, Chang | |
dc.contributor.author | Musa, Silke | |
dc.contributor.author | Li, Yi | |
dc.contributor.author | Stakenborg, Tim | |
dc.contributor.author | Sabuncuoglu Tezcan, Deniz | |
dc.contributor.author | Van Dorpe, Pol | |
dc.date.accessioned | 2021-10-20T13:07:46Z | |
dc.date.available | 2021-10-20T13:07:46Z | |
dc.date.issued | 2012 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21084 | |
dc.source | IIOimport | |
dc.title | Wafer scale processing of plasmonic nanopore arrays in 200mm CMOS fab environment | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Verbeeck, Rita | |
dc.contributor.imecauthor | Dupont, Tania | |
dc.contributor.imecauthor | Stakenborg, Tim | |
dc.contributor.imecauthor | Sabuncuoglu Tezcan, Deniz | |
dc.contributor.imecauthor | Van Dorpe, Pol | |
dc.contributor.orcidimec | Stakenborg, Tim::0000-0001-9878-9078 | |
dc.contributor.orcidimec | Sabuncuoglu Tezcan, Deniz::0000-0002-9237-7862 | |
dc.contributor.orcidimec | Van Dorpe, Pol::0000-0003-0918-1664 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 3987 | |
dc.source.conference | ECS Fall Meeting Symposium J6: Microfabricated and Nanofabricated Systems for MEMS/NEMS | |
dc.source.conferencedate | 7/10/2012 | |
dc.source.conferencelocation | Honolulu, HI USA | |
imec.availability | Published - open access | |