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Characterisation of mechanical stress in advanced PBL isolation

dc.contributor.authorJones, S. K.
dc.contributor.authorAhmed, M.
dc.contributor.authorRothwell, W. J.
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorDeferm, Ludo
dc.date.accessioned2021-09-29T12:42:33Z
dc.date.available2021-09-29T12:42:33Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/210
dc.sourceIIOimport
dc.titleCharacterisation of mechanical stress in advanced PBL isolation
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorDeferm, Ludo
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage255
dc.source.endpage258
dc.source.conference24th European Solid State Device Research Conference - ESSDERC
dc.source.conferencedate11/09/1994
dc.source.conferencelocationEdinburgh UK
imec.availabilityPublished - open access


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