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An Advanced Calibration Method for Modelling Oxidation and Mechanical Stress in Sub-Micron CMOS Isolation Structures
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Authors
Jones, S. K.
;
Poncet, A.
;
De Wolf, Ingrid
;
Ahmed, M.
;
Rothwell, W. J.
Conference
International Electron Devices Meeting (IEDM). Technical Digest
Title
An Advanced Calibration Method for Modelling Oxidation and Mechanical Stress in Sub-Micron CMOS Isolation Structures
Publication type
Proceedings paper
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