Publication:
An Advanced Calibration Method for Modelling Oxidation and Mechanical Stress in Sub-Micron CMOS Isolation Structures
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1996 since deposited on 2021-09-29
2last month
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Acq. date: 2025-12-11
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1996 since deposited on 2021-09-29
2last month
1last week
Acq. date: 2025-12-11
Citations