Publication:
An Advanced Calibration Method for Modelling Oxidation and Mechanical Stress in Sub-Micron CMOS Isolation Structures
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2006 since deposited on 2021-09-29
8last month
Acq. date: 2026-08-21
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Statistics
Views
2006 since deposited on 2021-09-29
8last month
Acq. date: 2026-08-21
Citations