Publication:

EDA solutions to new-defect detection in advanced process technologies

Date

2012

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

Marinissen, Erik Jan

;

Vandling, Gilbert

;

;

Hapke, Friedrich

;

;

Mittermaier, Nikolaus

;

Statistics

1905 since deposited on 2021-10-20

Acq. date: 2026-05-02