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EDA solutions to new-defect detection in advanced process technologies

dc.contributor.authorMarinissen, Erik Jan
dc.contributor.authorVandling, Gilbert
dc.contributor.authorGoel, Sandeep
dc.contributor.authorHapke, Friedrich
dc.contributor.authorRivers, Jason
dc.contributor.authorMittermaier, Nikolaus
dc.contributor.authorBahl, Swapnil
dc.date.accessioned2021-10-20T13:15:52Z
dc.date.available2021-10-20T13:15:52Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21106
dc.sourceIIOimport
dc.titleEDA solutions to new-defect detection in advanced process technologies
dc.typeProceedings paper
dc.contributor.imecauthorMarinissen, Erik Jan
dc.contributor.orcidimecMarinissen, Erik Jan::0000-0002-5058-8303
dc.source.peerreviewyes
dc.source.beginpage123
dc.source.endpage128
dc.source.conferenceDesign, Automation, and Test in Europe Conference and Exhibition - DATE
dc.source.conferencedate12/03/2012
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - imec


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