CMOS-compatible tungsten heaters for silicon photonic waveguides

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Authors
Masood, Adil; Pantouvaki, Marianna; Goossens, Danny; Lepage, Guy; Verheyen, Peter; Van Thourhout, Dries; Absil, Philippe; Bogaerts, Wim
Conference
9th International Conference on Group IV Photonics
Title
CMOS-compatible tungsten heaters for silicon photonic waveguides
Publication type
Proceedings paper
Embargo date
9999-12-31
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