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CMOS-compatible tungsten heaters for silicon photonic waveguides

dc.contributor.authorMasood, Adil
dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorGoossens, Danny
dc.contributor.authorLepage, Guy
dc.contributor.authorVerheyen, Peter
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorAbsil, Philippe
dc.contributor.authorBogaerts, Wim
dc.date.accessioned2021-10-20T13:20:38Z
dc.date.available2021-10-20T13:20:38Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21118
dc.sourceIIOimport
dc.titleCMOS-compatible tungsten heaters for silicon photonic waveguides
dc.typeProceedings paper
dc.contributor.imecauthorMasood, Adil
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorGoossens, Danny
dc.contributor.imecauthorLepage, Guy
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage234
dc.source.endpage236
dc.source.conference9th International Conference on Group IV Photonics
dc.source.conferencedate29/08/2012
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - open access


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