PIXE as a complementary technique to RBS in thin film characterization

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Authors
Meersschaut, Johan; Kayhko, Marko; Lenka, Hara; Zhao, Qiang; Vantomme, Andre; Vandervorst, Wilfried
Conference
22nd Intl. Conference on the Application of Accelerators in Research and Industry - CAARI
Title
PIXE as a complementary technique to RBS in thin film characterization
Publication type
Meeting abstract
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