dc.contributor.author | Meersschaut, Johan | |
dc.contributor.author | Kayhko, Marko | |
dc.contributor.author | Lenka, Hara | |
dc.contributor.author | Zhao, Qiang | |
dc.contributor.author | Vantomme, Andre | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-10-20T13:24:23Z | |
dc.date.available | 2021-10-20T13:24:23Z | |
dc.date.issued | 2012-03 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21128 | |
dc.source | IIOimport | |
dc.title | PIXE as a complementary technique to RBS in thin film characterization | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Meersschaut, Johan | |
dc.contributor.imecauthor | Vantomme, Andre | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.orcidimec | Meersschaut, Johan::0000-0003-2467-1784 | |
dc.source.peerreview | yes | |
dc.source.conference | 22nd Intl. Conference on the Application of Accelerators in Research and Industry - CAARI | |
dc.source.conferencedate | 8/08/2012 | |
dc.source.conferencelocation | Fort Worth, TX USA | |
imec.availability | Published - imec | |