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PIXE as a complementary technique to RBS in thin film characterization

dc.contributor.authorMeersschaut, Johan
dc.contributor.authorKayhko, Marko
dc.contributor.authorLenka, Hara
dc.contributor.authorZhao, Qiang
dc.contributor.authorVantomme, Andre
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-20T13:24:23Z
dc.date.available2021-10-20T13:24:23Z
dc.date.issued2012-03
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21128
dc.sourceIIOimport
dc.titlePIXE as a complementary technique to RBS in thin film characterization
dc.typeMeeting abstract
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorVantomme, Andre
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.source.peerreviewyes
dc.source.conference22nd Intl. Conference on the Application of Accelerators in Research and Industry - CAARI
dc.source.conferencedate8/08/2012
dc.source.conferencelocationFort Worth, TX USA
imec.availabilityPublished - imec


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