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Recombination activity of iron-related complexes in silicon studied with microwave and light-induced absorption techniques
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Authors
Kaniava, Arvydas
;
Rotondaro, Antonio
;
Vanhellemont, Jan
;
Simoen, Eddy
;
Gaubas, Eugenijus
;
Vaitkus, J.
;
Hurd, Trace
;
Mertens, Paul
;
Claeys, Cor
;
Gräf, D.
Conference
Proceedings of the 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS
Title
Recombination activity of iron-related complexes in silicon studied with microwave and light-induced absorption techniques
Publication type
Proceedings paper
Embargo date
9999-12-31
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