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IR micro bolometers, made of polycrystalline silicon germanium alloys

dc.contributor.authorSedky, Sherif
dc.contributor.authorFiorini, Paolo
dc.contributor.authorCaymax, Matty
dc.contributor.authorVerbist, Agnes
dc.contributor.authorBaert, Kris
dc.contributor.authorHermans, Lou
dc.date.accessioned2021-09-30T09:30:18Z
dc.date.available2021-09-30T09:30:18Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2127
dc.sourceIIOimport
dc.titleIR micro bolometers, made of polycrystalline silicon germanium alloys
dc.typeProceedings paper
dc.contributor.imecauthorCaymax, Matty
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage179
dc.source.endpage186
dc.source.conferenceProceedings of the 2nd Round Table of Micro-Nano Technologies for Space
dc.source.conferencedate15/10/1997
dc.source.conferencelocationNoordwijk The Nheterlands
imec.availabilityPublished - open access


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