NiO thin films synthesized by atomic layer deposition using Ni(dmamb)2 and O3 as precursors

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Authors

Peter, Antony; Toeller, Michael; Adelmann, Christoph; Meersschaut, Johan; Franquet, Alexis; Richard, Olivier; Tielens, Hilde; Brijs, Bert; Moussa, Alain; Conard, Thierry; Bender, Hugo; Schaekers, Marc; Kittl, Jorge; Jurczak, Gosia; Van Elshocht, Sven

DOI

10.1002/cvde.201106949

ISSN

0948-1907

Issue

1_3

Journal

Chemical Vapor Deposition

Volume

18

Title

NiO thin films synthesized by atomic layer deposition using Ni(dmamb)2 and O3 as precursors

Publication type

Journal article

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