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Recombination activity of iron-related complexes in silicon studied with microwave and light-induced absorption techniques

dc.contributor.authorKaniava, Arvydas
dc.contributor.authorRotondaro, Antonio
dc.contributor.authorVanhellemont, Jan
dc.contributor.authorSimoen, Eddy
dc.contributor.authorGaubas, Eugenijus
dc.contributor.authorVaitkus, J.
dc.contributor.authorHurd, Trace
dc.contributor.authorMertens, Paul
dc.contributor.authorClaeys, Cor
dc.contributor.authorGräf, D.
dc.date.accessioned2021-09-29T12:42:36Z
dc.date.available2021-09-29T12:42:36Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/212
dc.sourceIIOimport
dc.titleRecombination activity of iron-related complexes in silicon studied with microwave and light-induced absorption techniques
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage197
dc.source.endpage200
dc.source.conferenceProceedings of the 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS
dc.source.conferencedate19/09/1994
dc.source.conferencelocationBrugge Belgium
imec.availabilityPublished - open access


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