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Deep levels in heat-treated and 252Cf-irradiated P-type silicon substrates with different oxygen content
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Authors
Kaniava, Arvydas
;
Vanhellemont, Jan
;
Simoen, Eddy
;
Claeys, Cor
Journal
Semiconductor Science and Technology
Volume
9
Title
Deep levels in heat-treated and 252Cf-irradiated P-type silicon substrates with different oxygen content
Publication type
Journal article
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