Spacer-defined EUV lithography reducing variability of 12nm NAND Flash memories

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Authors
Poliakov, Pavel; Blomme, Pieter; Vaglio Pret, Alessandro; Miranda Corbalan, Miguel; Gronheid, Roel; Wiaux, Vincent; Versluijs, Janko; Verkest, Diederik; Van Houdt, Jan; Dehaene, Wim
Conference
4th IEEE International Memory Workshop - IMW
Title
Spacer-defined EUV lithography reducing variability of 12nm NAND Flash memories
Publication type
Proceedings paper
Embargo date
9999-12-31
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