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Scalability of ALD strontium titanate films

dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorSwerts, Johan
dc.contributor.authorTomida, Kazuyuki
dc.contributor.authorKim, Min-Soo
dc.contributor.authorDelabie, Annelies
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorFranquet, Alexis
dc.contributor.authorKaczer, Ben
dc.contributor.authorJurczak, Gosia
dc.contributor.authorVan Elshocht, Sven
dc.date.accessioned2021-10-20T14:45:42Z
dc.date.available2021-10-20T14:45:42Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21327
dc.sourceIIOimport
dc.titleScalability of ALD strontium titanate films
dc.typeMeeting abstract
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorTomida, Kazuyuki
dc.contributor.imecauthorKim, Min-Soo
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.source.peerreviewyes
dc.source.conference12th International Conference on Atomic Layer Deposition
dc.source.conferencedate17/06/2012
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - imec


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