Electrical characterization of 3D capacitor with carbon nanowalls as bottom electrode

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Authors
Qaid, Mohammad; Radu, Iuliana; Cott, Daire; AL-SALHI, Mohamad; Vereecken, Philippe
Conference
4th International Conference NANOCON
Title
Electrical characterization of 3D capacitor with carbon nanowalls as bottom electrode
Publication type
Meeting abstract
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