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Electrical characterization of 3D capacitor with carbon nanowalls as bottom electrode

dc.contributor.authorQaid, Mohammad
dc.contributor.authorRadu, Iuliana
dc.contributor.authorCott, Daire
dc.contributor.authorAL-SALHI, Mohamad
dc.contributor.authorVereecken, Philippe
dc.date.accessioned2021-10-20T14:57:09Z
dc.date.available2021-10-20T14:57:09Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21355
dc.sourceIIOimport
dc.titleElectrical characterization of 3D capacitor with carbon nanowalls as bottom electrode
dc.typeMeeting abstract
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.source.peerreviewno
dc.source.conference4th International Conference NANOCON
dc.source.conferencedate23/10/2012
dc.source.conferencelocationBrno Czech Republic
imec.availabilityPublished - imec


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