Authors

Ragnarsson, Lars-Ake; Adelmann, Christoph; Higuchi, Yuichi; Opsomer, Karl; Veloso, Anabela; Chew, Soon Aik; Rohr, Erica; Vecchio, Emma; Shi, Xiaoping; Devriendt, Katia; Sebaai, Farid; Kauerauf, Thomas; Pawlak, Malgorzata; Schram, Tom; Van Elshocht, Sven; Horiguchi, Naoto; Thean, Aaron

Conference

Symposium on VLSI Technology - VLSIT

Title

Implementing cubic-phase HfO2 with $j-value ~ 30 in low-VT replacementgate pMOS devices for improved EOT-Scaling and reliability

Publication type

Proceedings paper

Embargo date

9999-12-31