Authors

Rampelberg, Geert; Schaekers, Marc; Martens, Koen; Xie, Qi; Deduytsche, Davy; De Schutter, Bob; Blasco, Nicolas; Kittl, Jorge; Detavernier, Christophe

Conference

Materials for Advanced Metallization - MAM

Title

Semiconductor-metal transition in thin VO2 films deposited by ozone based atomic layer deposition

Publication type

Meeting abstract

Embargo date

9999-12-31