Publication:
Bulk FinFET fabrication with new approaches for oxide topography control using dry removal techniques
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2038 since deposited on 2021-10-20
5last month
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Acq. date: 2026-01-09
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Views
2038 since deposited on 2021-10-20
5last month
3last week
Acq. date: 2026-01-09
Citations