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All track directed self-assembly of block copolymers: process flow and origin of defects

dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorGronheid, Roel
dc.contributor.authorThode, Christopher J.
dc.contributor.authorWu, Hengpeng
dc.contributor.authorCao, Yi
dc.contributor.authorSomervell, Mark
dc.contributor.authorNafus, Kathleen
dc.contributor.authorNealy, Paul F.
dc.date.accessioned2021-10-20T15:12:33Z
dc.date.available2021-10-20T15:12:33Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21390
dc.sourceIIOimport
dc.titleAll track directed self-assembly of block copolymers: process flow and origin of defects
dc.typeProceedings paper
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorNafus, Kathleen
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage83230D
dc.source.conferenceAlternative Lithographic Technologies IV
dc.source.conferencedate12/02/2012
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - open access
imec.internalnotesProceedings SPIE; Vol. 8323


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