Authors

Rincon Delgadillo, Paulina; Nealey, Paul; Gronheid, Roel; Matsunaga, Koichi; Somervell, Mark; Nafus, Kathleen; Cao, Yi; Lin, Guanyang

Conference

FujiFilm Litho Workshop

Title

Implementation of directed self-assembly of block copolymers in the fab for defectivity analysis

Publication type

Oral presentation