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Implementation of directed self-assembly of block copolymers in the fab for defectivity analysis

dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorNealey, Paul
dc.contributor.authorGronheid, Roel
dc.contributor.authorMatsunaga, Koichi
dc.contributor.authorSomervell, Mark
dc.contributor.authorNafus, Kathleen
dc.contributor.authorCao, Yi
dc.contributor.authorLin, Guanyang
dc.date.accessioned2021-10-20T15:13:28Z
dc.date.available2021-10-20T15:13:28Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21392
dc.sourceIIOimport
dc.titleImplementation of directed self-assembly of block copolymers in the fab for defectivity analysis
dc.typeOral presentation
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorNafus, Kathleen
dc.source.peerreviewno
dc.source.conferenceFujiFilm Litho Workshop
dc.source.conferencedate11/09/2012
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - imec


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