Interactions between imaging layers during LPLE double patterning lithography

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Authors
Robertson, Stewart; Wong, Patrick; De Bisschop, Peter; Vandenbroeck, Nadia; Wiaux, Vincent
Conference
Optical Microlithography XXV
Title
Interactions between imaging layers during LPLE double patterning lithography
Publication type
Proceedings paper
Embargo date
9999-12-31
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