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Comparison of Ni- and SiGe-based MEMS magnetometers

dc.contributor.authorRochus, Veronique
dc.contributor.authorJansen, Roelof
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorTilmans, Harrie
dc.contributor.authorRanvier, Sylvain
dc.contributor.authorLamy, Hervé
dc.contributor.authorRochus, Pierre
dc.date.accessioned2021-10-20T15:18:29Z
dc.date.available2021-10-20T15:18:29Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21403
dc.sourceIIOimport
dc.titleComparison of Ni- and SiGe-based MEMS magnetometers
dc.typeProceedings paper
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.conference13th Int. Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics - EuroSimE
dc.source.conferencedate16/04/2012
dc.source.conferencelocationLisboa Portugal
imec.availabilityPublished - open access


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