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Consistent analytical model for single and dual thickness capacitive micromachined ultrasound transducers (cMUT)

dc.contributor.authorRottenberg, Xavier
dc.contributor.authorErismis, Mehmet Akif
dc.contributor.authorCzarnecki, Piotr
dc.contributor.authorHelin, Philippe
dc.contributor.authorVerbist, Agnes
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-20T15:31:34Z
dc.date.available2021-10-20T15:31:34Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21430
dc.sourceIIOimport
dc.titleConsistent analytical model for single and dual thickness capacitive micromachined ultrasound transducers (cMUT)
dc.typeProceedings paper
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorCzarnecki, Piotr
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.conference13th Int. Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics - EuroSimE
dc.source.conferencedate16/04/2012
dc.source.conferencelocationEstoril Portugal
imec.availabilityPublished - open access
imec.internalnotesKeynote presentation


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