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Low motional impedance bulk acoustic resonators based on metamaterials

dc.contributor.authorRottenberg, Xavier
dc.contributor.authorJansen, Roelof
dc.contributor.authorRochus, Veronique
dc.contributor.authorFigeys, Bruno
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-20T15:32:01Z
dc.date.available2021-10-20T15:32:01Z
dc.date.issued2012-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21431
dc.sourceIIOimport
dc.titleLow motional impedance bulk acoustic resonators based on metamaterials
dc.typeProceedings paper
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorFigeys, Bruno
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecFigeys, Bruno::0000-0002-0108-3907
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewyes
dc.source.conferenceNANOTECH: Modeling & Simulation of Microsystems - MSM
dc.source.conferencedate18/06/2012
dc.source.conferencelocationSanta Clara, CA USA
imec.availabilityPublished - imec


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