HfSiO bulk trap density controls the initial Vth in nMOSFETs

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Authors

Sahhaf, Sahar; Degraeve, Robin; Srividya, Vydia; De Brabanter, K.; Schram, Tom; Gilbert, Matthieu; Vandervorst, Wilfried; Groeseneken, Guido

ISSN

1530-4388

Issue

2

Journal

IEEE Transactions on Device and Materials Reliability

Volume

12

Title

HfSiO bulk trap density controls the initial Vth in nMOSFETs

Publication type

Journal article

Embargo date

9999-12-31

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