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Elemental redistribution of Pt and Pd in nickel silicides: a comparative study

dc.contributor.authorSchrauwen, A.
dc.contributor.authorDemeulemeester, Jelle
dc.contributor.authorKumar, Arul
dc.contributor.authorDe Schutter, B.
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorDetavernier, C.M.
dc.contributor.authorComrie, C.M.
dc.contributor.authorTemst, Kristiaan
dc.contributor.authorVantomme, Andre
dc.date.accessioned2021-10-20T15:52:43Z
dc.date.available2021-10-20T15:52:43Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21477
dc.sourceIIOimport
dc.titleElemental redistribution of Pt and Pd in nickel silicides: a comparative study
dc.typeMeeting abstract
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorTemst, Kristiaan
dc.contributor.imecauthorVantomme, Andre
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpageO4-4
dc.source.conferenceMaterials for Advanced Metallization - MAM
dc.source.conferencedate11/03/2012
dc.source.conferencelocationGrenoble France
imec.availabilityPublished - open access


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