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System optimization methodology for integrated piezoelectric MEMS resonator biochemical sensors

dc.contributor.authorSieben-Xu, Ling
dc.contributor.authorPettine, Julia
dc.contributor.authorPetrescu, Violeta
dc.contributor.authorVandecasteele, Marianne
dc.contributor.authorKarabacak, Devrez
dc.date.accessioned2021-10-20T16:06:43Z
dc.date.available2021-10-20T16:06:43Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21507
dc.sourceIIOimport
dc.titleSystem optimization methodology for integrated piezoelectric MEMS resonator biochemical sensors
dc.typeProceedings paper
dc.source.peerreviewyes
dc.source.beginpage635
dc.source.endpage638
dc.source.conference26th European Conference on Solid-State Transducers - EUROSENSOR
dc.source.conferencedate9/09/2012
dc.source.conferencelocationKrakow Poland
imec.availabilityPublished - imec
imec.internalnotesProcedia Engineering; Vol.


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