Rapid thermal annealing of spin-coated phosphoric acid films for shallow junction formation

View/open

2127.pdf (55.57Kb)

Metadata

Show full item record

Authors

Sivoththaman, Sivanarayanamoorthy; Laureys, Wim; Nijs, Johan; Mertens, Robert

Issue

3

Journal

Applied Physics Letters

Volume

71

Title

Rapid thermal annealing of spin-coated phosphoric acid films for shallow junction formation

Publication type

Journal article

Embargo date

9999-12-31

Collections

Articles